Fabrication of Co-Cr pependicular magnetic recording media by bias sputtering

Journal of Magnetics Society of Japan Volume 17 Issue S2(Supplement) Page 231-236

published_at 1993

Title

バイアス・スパッタ法によるCo-Cr垂直磁気記録媒体の作製

Creators Yamamoto Setsuo

Creators 松本隆之

Creators Kurisu Hiroki

Creators 松浦満

Creator Keywords

perpendicular magnetic recording Co-Cr sputtering bias

Co-Cr perpendicular magnetic recording media were fabricated by using an RF diode sputtering apparatus with applying DC bias voltage to a substrate holder. As the DC bias voltage increases, perpendicular orientation of cobalt c-axis deteriorates, and perpendicular magnetic anisotropy decreases. At the proper bias voltage, high perpendicular coercivity is achieved by moderating the influence of impurity gas, and consequently the high reproduced voltage is obtained at high-densities.

Languages jpn

Resource Type journal article

Publishers 日本応用磁気学会

Date Issued 1993

File Version Not Applicable (or Unknown)

Access Rights metadata only access

Relations

[ISSN]0285-0192

[NCID]AN0031390X

[isVersionOf] [URI]http://www.wdc-jp.com/msj/journal/index.html

Schools 大学院理工学研究科（工学）