Fabrication of photothermally driven micropump using SU-8/Cu composite
Journal of Micromechanics and Microengineering Volume 36 Issue 1
published_at 2026-01-21
Title
Fabrication of photothermally driven micropump using SU-8/Cu composite
Creators
Maruyama Daiki
Source Identifiers
[PISSN] 0960-1317
[EISSN] 1361-6439
Creator Keywords
photosensitive composite
SU-8
polydimethylsiloxane
copper particle
lab-on-a-chip
photothermally actuated device
micropump
Languages
eng
Resource Type
journal article
Publishers
IOP Publishing
Date Issued
2026-01-21
Rights
© 2026 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.()
This is the Accepted Manuscript version of an article accepted for publication in Journal of Micromechanics and Microengineering. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.1088/1361-6439/ae3620.()
This Accepted Manuscript is available for reuse under a CC BY-NC-ND licence after the 12 month embargo period provided that all the terms of the licence are adhered to.()
Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International(https://creativecommons.org/licenses/by-nc-nd/4.0/)
File Version
Accepted Manuscript
Access Rights
embargoed access
Relations
[isVersionOf]
10.1088/1361-6439/ae3620
Funding Refs
Japan Society for the Promotion of Science
[crossref_funder]https://doi.org/10.13039/501100001691
Award
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