Preparation of Highly Sinter-resistant Materials Si₃N₄ and AlN by Direct Metal Nitridation Method : Especially, High Qualification by Morphology Control and Formation Mechanism
Title
金属直接窒化法による難焼結性材料Si_3N_4, AlNの作製 : 特に, 形態制御と生成機構による高品質化
Preparation of Highly Sinter-resistant Materials Si₃N₄ and AlN by Direct Metal Nitridation Method : Especially, High Qualification by Morphology Control and Formation Mechanism
Degree
博士(工学)
Dissertation Number
創科博甲第143号
(2024-03-18)
Degree Grantors
Yamaguchi University
[kakenhi]15501
grid.268397.1
Creators
中村 美幸
Languages
jpn
Resource Type
doctoral thesis
File Version
Version of Record
Access Rights
open access