Thermal decomposition of tetrabromosilane and deposition of crystalline silicon

Materials Science in Semiconductor Processing Volume 23 Page 93-97

published_at 2014-07

Title

Creators Nakayama Masaharu

Creators Miyamoto Seiji

Creators Ogawa Takuro

Creators Osae Shogo

Creators Tomono Kazuaki

Creators Sumimoto Michinori

Creators Sakata Yoshihisa

Creators Komatsu Ryuichi

Creator Keywords

SiBr_4 Thermochemical decomposition Si deposition Flow reactor

Languages eng

Resource Type journal article

Publishers Elsevier Science

Date Issued 2014-07

File Version Not Applicable (or Unknown)

Access Rights metadata only access

Relations

[ISSN]1369-8001

[NCID]AA11350145

info:doi/10.1016/j.mssp.2014.02.045

[isVersionOf] [URI]http://www.sciencedirect.com/science/journal/13698001

Schools 大学院理工学研究科（工学）