Investigations on hydrobromination of silicon in the presence of silicon carbide abrasives as a purification route of kerf loss waste
Separation and purification technology Volume 103
Page 109-113
published_at 2013-01-15
Title
Investigations on hydrobromination of silicon in the presence of silicon carbide abrasives as a purification route of kerf loss waste
Creators
Furuya Hirotoshi
Creators
Miyamoto Seiji
Creators
Okamura Yuki
Creator Keywords
silicon
silicon carbide
kerf loss
hydrobromination
gas chromatography
Languages
eng
Resource Type
journal article
Publishers
Elsevie
Elsevier Sciencer
Date Issued
2013-01-15
File Version
Not Applicable (or Unknown)
Access Rights
metadata only access
Relations
[ISSN]1383-5866
[NCID]AA11136087
[NCID]AA11529807
[isVersionOf]
[URI]http://www.sciencedirect.com/science/journal/13835866
Schools
大学院理工学研究科（工学）