Synthesis of ITO powder by dry process and lifetime characteristics of the ITO target fabricated with its powder
The transactions of the Institute of Electrical Engineers of Japan. C, A publication of Electronics, Information and Systems Society Volume 132 Issue 1
Page 77-82+8
published_at 2012
Title
ドライプロセスによるITO粉の合成とそれを用いて作製したITOターゲットのライフ特性
Synthesis of ITO powder by dry process and lifetime characteristics of the ITO target fabricated with its powder
Creator Keywords
ITO
スパッタリングターゲット
ターゲットライフ
乾式合成
炭素濃度
ITO粉
Sputtering target
Target lifetime
Dry synthesis
Carbon concentration
ITO powder
Languages
jpn
Resource Type
journal article
Publishers
電気学会
Date Issued
2012
File Version
Not Applicable (or Unknown)
Access Rights
metadata only access
Relations
[ISSN]0385-4221
[NCID]AN10065950
[isVersionOf]
[URI]http://www.scopus.com/inward/record.url?eid=2-s2.0-84856764988&partnerID=40&md5=9da99a00e217f4b952ac1f94e5af9fa2
Schools
大学院理工学研究科（工学）