Automatic measurement of plasma parameters by digital data processing from langmuir probe characteristics
Memoirs of the Faculty of Engineering, Yamaguchi University Volume 42 Issue 1
Page 113-120
published_at 1991-10
Title
ラングミュアプローブ特性からのディジタル処理によるプラズマパラメータの自動計測
Automatic measurement of plasma parameters by digital data processing from langmuir probe characteristics
Source Identifiers
We have developed an automatic measurement system of plasma parameters (i.e. electron temperature Te, space potential Vs, floating potential Vf, electron density Ne) including the electron energy distribution function (EEDF) by means of the digital data processing from Langmuir probe characteristics. In order to overcome the problems of conventional probe analysis, this system has an efficient algorithm not only for smoothing the Vp-Ip characteristics but also for determining Te reasonably. It is also confirmed experimentally that this system enables us to determine plasma parameters without artificial errors in a rapid time.
Languages
jpn
Resource Type
departmental bulletin paper
Publishers
山口大学工学部
Date Issued
1991-10
File Version
Version of Record
Access Rights
open access
Relations
[ISSN]0372-7661
[NCID]AN00244228
Schools
工学部