Stress analysis of a silicon-wafer slicer cutting the crystal ingot

Transactions of the ASME. Journal of mechanical design Volume 115 Issue 4 Page 711-717

published_at 1993-12

Title

Creators Chonan S.

Creators Jiang Z.W.

Creators Yuki Y.

Languages eng

Resource Type journal article

Publishers American Society of Mechanical Engineers

Date Issued 1993-12

File Version Not Applicable (or Unknown)

Access Rights metadata only access

Relations

[ISSN]1050-0472

[NCID]AA10753248

info:doi/10.1115/1.2919259

[isVersionOf] [URI]http://asmedl.aip.org/MechanicalDesign/

Schools 大学院理工学研究科（工学）