Vibration and deflection of a silicon-wafer slicer cutting the crystal ingot

Proceedings of the International Conference on Motion and Vibration Control Page 443-448

published_at 1992

2009010404.pdf

[fulltext] 485 KB

Title

Vibration and deflection of a silicon-wafer slicer cutting the crystal ingot

Creators Chonan Seiji

Creators Jiang Zhong-wei

Creators Yuki Yasuhiro

Creator Keywords

vibration deflecton silicon-wafer slicer crystal ingot

First International Conference on Motion and Vibration Control, held at the Pacific Convention Plaza Yokohma (Pacifico Yokohama), 7-11 September, 1992.

Languages eng

Resource Type conference paper

Publishers 日本機械学会

Date Issued 1992

File Version Version of Record

Access Rights open access

Relations

[NCID]AA11902354

Schools 大学院理工学研究科（工学）