Low temperature sputter-deposition of Ni-Zn ferrite thin-films using electron-cyclotron-resonance microwave plasma
Transactions of the Materials Research Society of Japan Volume 28 Issue 4
Page 1105-1108
published_at 2003
Title
Low temperature sputter-deposition of Ni-Zn ferrite thin-films using electron-cyclotron-resonance microwave plasma
Creator Keywords
Ni-Zn ferrite thin films
reactive ECR sputtering
high-rate deposition
low temperature
Languages
eng
Resource Type
journal article
Publishers
Materials Resarch society of Japan
Date Issued
2003
Rights
(C)The Materials Resarch society of Japan(日本MRS)()
File Version
Version of Record
Access Rights
open access
Relations
[ISSN]1382-3469
[NCID]AA10850652
Schools
大学院理工学研究科（工学）