Co-Cr films prepared by sputtering using electron cyclotron resonance microwave plasma

Journal of applied physics Volume 79 Issue 8 Page 4896-4898

published_at 1996-04-15

Title

Creators Yamamoto S.

Creators Sato K.

Creators Kurisu H.

Creators Matsuura M.

Languages eng

Resource Type journal article

Publishers American Institute of Physics

Date Issued 1996-04-15

File Version Version of Record

Access Rights open access

Relations

[ISSN]0021-8979

[NCID]AA00693547

info:doi/10.1063/1.361925

[isVersionOf] [URI]http://jap.aip.org/

Schools 大学院理工学研究科（工学）