Transparent Electrically Conducting Cd-Sn Oxide Films by D-C Reactive Sputtering
Memoirs of the Faculty of Engineering, Yamaguchi University Volume 29 Issue 1
Page 91-96
published_at 1978
Title
直流反応性スパッタ法による Cd-Sn 酸化物透明導電膜
Transparent Electrically Conducting Cd-Sn Oxide Films by D-C Reactive Sputtering
Creators
Miyata Naoyuki
Creators
Nao Satoru
Creators
Miyake Kiyoshi
Source Identifiers
High conductive, transparent films of Cd-Sn oxide have been prepared by dc diode reactive sputtering of Cd-Sn alloys in Ar-O_2 mixtures. Alloy targets (Cd/Sn atomic ratio of 2 : 1) were utilized. Experiments have been carried out under the following conditions. The ratio of Ar/O_2 and the total pressure of gas mixture were ranged from 9/1 to 4/1,and from 1×(10)^<-2> to 6×(10)^<-2> Torr, respectively. The dc applied voltage was in the range of 1&acd
Languages
jpn
Resource Type
departmental bulletin paper
Publishers
山口大学工学部
Date Issued
1978
File Version
Version of Record
Access Rights
open access
Relations
[ISSN]0372-7661
[NCID]AN00244228
Schools
工学部