Spatial control of electron energy distribution function in a magnetically filtered multicusp plasma source
Japanese journal of applied physics. Pt. 2, Letters Volume 30 Issue 6A
Page L1063-L1065
published_at 1991-06
Title
Spatial control of electron energy distribution function in a magnetically filtered multicusp plasma source
Using a movable magnetic filter, a technique to control plasma parameters spatially has been investigated in a multicusp plasma source. At any filter position, plasma parameters change steeply across the magnetic filter. Mainly, a multicusp plasma source is divided into two parts, i.e., a source plasma region with energetic electrons and a diffused plasma region. In the latter region, the high-energy component of electrons is eliminated thoroughly by the localized magnetic field of the filter.
Languages
eng
Resource Type
journal article
Publishers
応用物理学会
Date Issued
1991-06
File Version
Not Applicable (or Unknown)
Access Rights
metadata only access
Relations
[ISSN]0021-4922
[NCID]AA10650595
[isVersionOf]
[URI]http://www.ipap.jp/jjap/index.htm
Schools
大学院理工学研究科（工学）