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publish year1995 - 1999 keywordsilicon-wafer slicer
publish year
1995 - 1999 2
keyword
crystal ingot 2 deflection 2 rotary machinery 2 silicon-wafer slicer 2 PD control 1 air film stiffness 1 transient response 1
resource type
journal article 2
school
大学院理工学研究科（工学） 2
Result 2 Items
Id (<span class="translation_missing" title="translation missing: en.view.desc">Desc</span>)
Active flatness control of a large-scale silicon-wafer slicer cutting a crystal ingot : feedback vibration controller for ID sawblade
Transactions of the Japan Society of Mechanical Engineers. C Volume 61 Issue 587
Creators : Masui Keijiro | Chonan Seiji | Kai Fumitaka | Jiang Zhong-Wei Publishers : 日本機械学会 Date Issued : 1995-07
Active flatness control of a large-scale silicon-wafer slicer cutting a crystal ingot : effect on the deflection control of the air film stiffness between the blade and the ingot
Transactions of the Japan Society of Mechanical Engineers. C Volume 61 Issue 582
Creators : Masui Keijiro | Chonan Seiji | Jiang Zhong-Wei Publishers : 日本機械学会 Date Issued : 1995-02
Related Creatrors
Jiang Zhongwei 2
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