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publish year1990 - 1994 keywordsilicon-wafer slicer resource typeconference paper school大学院理工学研究科（工学）
publish year
1990 - 1994 1
keyword
crystal ingot 1 deflecton 1 silicon-wafer slicer 1 vibration 1
resource type
conference paper 1
school
大学院理工学研究科（工学） 1
Result 1 Items
Id (<span class="translation_missing" title="translation missing: en.view.desc">Desc</span>)
Vibration and deflection of a silicon-wafer slicer cutting the crystal ingot
Proceedings of the International Conference on Motion and Vibration Control
Creators : Chonan Seiji | Jiang Zhong-wei | Yuki Yasuhiro Publishers : 日本機械学会 Date Issued : 1992
Related Creatrors
Jiang Zhongwei 1
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