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publish year2005 - 2009 keywordreactive sputtering
publish year
2005 - 2009 1
keyword
ECR 1 electron cyclotron resonance 1 ferrite 1 reactive sputtering 1 sputtering 1
resource type
journal article 1
school
大学院理工学研究科（工学） 1
Result 1 Items
Id (<span class="translation_missing" title="translation missing: en.view.desc">Desc</span>)
Development of low-temperature and high-rate-deposition technology for ferrite thin-films using ECR sputtering apparatus designed for mass production
粉体および粉末冶金 Volume 53 Issue 8
Creators : Yamamoto Setsuo | Matsuura Mitsuru | Okada Shigenobu | Shimosato Yoshihiro Publishers : 粉体粉末冶金協会 Date Issued : 2006-08
Related Creatrors
Yamamoto Setsuo 1
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