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publish year1990 - 1994 keywordplasma processing resource typejournal article school大学院理工学研究科(工学)
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Synthesis of diamond using low pressure plasma jet
Japanese journal of applied physics. Pt. 1, Regular papers & short notes Volume 33 Issue 7B
Creators : Sakiyama Satoshi | Fukumasa Osamu | Aoki Keiichirou Publishers : 応用物理学会 Date Issued : 1994