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High rate and low-temperature sputter-deposition of Ni-Zn ferrite thin-films

Transactions of the Materials Research Society of Japan Volume 29 Issue 4

Creators : Ogita Tomoharu | Yamamoto Setsuo | Isida Gen | Kurisu Hiroki | Matsuura Mitsuru | Shimosato Yoshihiro | Okada Shigenobu Publishers : Materials Resarch society of Japan Date Issued : 2004

High-rate reactive-ECR-sputter-deposition of Ni-Zn ferrite thin films using conic sputtering target

Journal of Magnetics Society of Japan Volume 28 Issue 5

Creators : Yamamoto Setsuo | Kurisu Hiroki | 栗巣普揮 | 松浦満 | 下里義博 | 岡田繁信 Publishers : 日本応用磁気学会 Date Issued : 2004