コンテンツメニュー
publish year1990 - 1994 keywordSpatial control resource typejournal article school大学院理工学研究科(工学)
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Spatial control of processing plasmas in a multicusp plasma source equipped with a movable magnetic filter
The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society Volume 111 Issue 12
Creators : Fukumasa Osamu | Naitou Hiroshi | Sakiyama Satoshi Publishers : 電気学会 Date Issued : 1991