publish year
2000 - 2004
keyword
Plasma processing
resource type
journal article
publish year
2000 - 2004
1
keyword
Laminar plasma
1
Plasma jet generator
1
Plasma processing
1
Thermal plasma
1
resource type
journal article
1
school
大学院理工学研究科（工学）
1
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High thermal efficiency-type laminar plasma jet generator for plasma processing
Vacuum Volume 59 Issue 1
Creators
: Osaki Katashi | Fukumasa Osamu | Kobayashi Akira
Publishers
: Elsevier
Date Issued
: 2000-10
