コンテンツメニュー
publish year1995 - 1999 keywordPD control resource typejournal article
publish year
1995 - 1999 1
keyword
PD control 1 crystal ingot 1 deflection 1 rotary machinery 1 silicon-wafer slicer 1 transient response 1
resource type
journal article 1
school
大学院理工学研究科（工学） 1
Result 1 Items
Id (<span class="translation_missing" title="translation missing: en.view.desc">Desc</span>)
Active flatness control of a large-scale silicon-wafer slicer cutting a crystal ingot : feedback vibration controller for ID sawblade
Transactions of the Japan Society of Mechanical Engineers. C Volume 61 Issue 587
Creators : Masui Keijiro | Chonan Seiji | Kai Fumitaka | Jiang Zhong-Wei Publishers : 日本機械学会 Date Issued : 1995-07
Related Creatrors
Jiang Zhongwei 1
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