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Numerical simulation 2
Chemical vapor deposition 1
Diffusion-controlling 1
Heat transfer 1
Natural convection 1
Phase change 1
Polystyrene packed bed 1
Surface reaction 1
Titanium nitride 1
化学蒸着法 1
拡散律速 1
数値解析 1
窒化チタン 1
表面反応 1
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