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keywordHigh-rate deposition resource typejournal article school大学院理工学研究科（工学）
publish year
2000 - 2004 1
keyword
ECR sputtering 1 Electron-cyclotron-resonance 1 High-rate deposition 1 Thin films 1
resource type
journal article 1
school
大学院理工学研究科（工学） 1
Result 1 Items
Id (<span class="translation_missing" title="translation missing: en.view.desc">Desc</span>)
High-rate deposition of Co-Cr films with perpendicular magnetic anisotropy by ECR sputtering
Journal of magnetism and magnetic materials Volume 235 Issue 1-3
Creators : Yamamoto Setsuo | Wada Hirofumi | Kurisu Hiroki | Matsuura Mitsuru Publishers : Elsevier Date Issued : 2001
Related Creatrors
Yamamoto Setsuo 1 Kurisu Hiroki 1
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