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keywordECR resource typejournal article school
publish year
1995 - 1999 2 2005 - 2009 1
keyword
ECR 3 sputtering 3 Co-Cr 1 Co-Cr-Ta 1 compopsitional separation 1 electron cyclotron resonance 1 ferrite 1 magnetic field 1 magnetic microstructure 1 perpendicular magnetic recording 1 perpendicular recording 1 reactive sputtering 1
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resource type
journal article 3
school
大学院理工学研究科（工学） 3
Result 3 Items
Id (<span class="translation_missing" title="translation missing: en.view.desc">Desc</span>)
Development of low-temperature and high-rate-deposition technology for ferrite thin-films using ECR sputtering apparatus designed for mass production
粉体および粉末冶金 Volume 53 Issue 8
Creators : Yamamoto Setsuo | Matsuura Mitsuru | Okada Shigenobu | Shimosato Yoshihiro Publishers : 粉体粉末冶金協会 Date Issued : 2006-08
ECR-sputter-deposited Co-Cr-Ta perpendicular recording disk
Journal of Magnetics Society of Japan Volume 23 Issue S2(Supplement)
Creators : Yamamoto Setsuo | 池田 朋広 | 平田 京 | Kurisu Hiroki | 松浦 満 Publishers : 日本応用磁気学会 Date Issued : 1999
Preparation of Co-Cr films using electron-cyclotron resonance microwave plasma sputtering: Effects of plasma control using a magnetic field
Journal of Magnetics Society of Japan Volume 22 Issue 2
Creators : 中村 哲也 | Yamamoto Setsuo | 佐藤 王高 | Kurisu Hiroki | 松浦 満 | 前田 安 | 廣野 滋 Publishers : 日本応用磁気学会 Date Issued : 1998
Related Creatrors
Yamamoto Setsuo 3 Kurisu Hiroki 2
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