コンテンツメニュー
publish year2010 - 2014 keywordChemical vapor deposition resource typejournal article school大学院理工学研究科（工学）
publish year
2010 - 2014 1
keyword
Chemical vapor deposition 1 Diffusion-controlling 1 Numerical simulation 1 Surface reaction 1 Titanium nitride 1 化学蒸着法 1 拡散律速 1 数値解析 1 窒化チタン 1 表面反応 1
resource type
journal article 1
school
大学院理工学研究科（工学） 1 大学院理工学研究科 1
Result 1 Items
Id (<span class="translation_missing" title="translation missing: en.view.desc">Desc</span>)
Heat and mass transfer analysis for coating process of TiN thin film in a tubular reactor by thermal CVD
Kagaku kogaku ronbunshu Volume 40 Issue 5
Creators : Hatori Yuya | Yamamoto Hiroki | Tanoue Kenichiro | Nishimura Tatsuo Publishers : 化学工学会 Date Issued : 2014-09-20
Related Creatrors
Nshimura Tatsuo 1 Tanoue Ken-ichiro 1
Yamaguchi Univ. Library
〒753-8511　1677-1 Yoshida, Yamaguchi, Yamaguchi

E-Mail: yunoca@yamaguchi-u.ac.jp
Copyright（C）2006-2018 Yamaguchi University Library. All Rights Reserved.