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Development of ID-blade slicer monitoring system for cutting 12-inch silicon ingot

Applied electromagnetism and mechanics Volume 9 Page 539-540
published_at 2001
2010010215.pdf
[fulltext] 168 KB
Title
Development of ID-blade slicer monitoring system for cutting 12-inch silicon ingot
Creators Jiang Zhongwei
Creators Fujiwara Shusuke
Creators Chonan Seiji
Creators Kawashima Kazuo
Languages eng
Resource Type conference paper
Publishers Japan Society of Applied Electromagnetics
Date Issued 2001
File Version Version of Record
Access Rights open access
Schools 大学院理工学研究科(工学)