Preparation of perpendicular Co-Cr magnetic discs with ECR sputtering

日本応用磁気学会学術講演概要集 Volume 21 Page 158-

published_at 1997

Title

ECRスパッタ法によるCo-Cr垂直磁気ディスクの作製

Creators Kanamaru N.

Creators Yamamoto S.

Creators Nakamura T.

Creators Kurisu H.

Creators Matsuura M.

Creators Hirono S.

Languages jpn

Resource Type conference paper

Publishers 日本応用磁気学会

Date Issued 1997

Rights

File Version Version of Record

Access Rights open access

Relations

[ISSN]1340-8100

[NCID]AN10269644

Schools 大学院理工学研究科（工学）