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Preparation of perpendicular Co-Cr magnetic discs with ECR sputtering

日本応用磁気学会学術講演概要集 Volume 21 Page 158-
published_at 1997
2009010280.pdf
[fulltext] 147 KB
Title
ECRスパッタ法によるCo-Cr垂直磁気ディスクの作製
Preparation of perpendicular Co-Cr magnetic discs with ECR sputtering
Creators Kanamaru N.
Creators Yamamoto S.
Creators Nakamura T.
Creators Kurisu H.
Creators Matsuura M.
Creators Hirono S.
Languages jpn
Resource Type conference paper
Publishers 日本応用磁気学会
Date Issued 1997
Rights
Copyright : 日本応用磁気学会 (The Magnetics Society of Japan)()
File Version Version of Record
Access Rights open access
Relations
[ISSN]1340-8100
[NCID]AN10269644
Schools 大学院理工学研究科(工学)