Contents Menu

Preparation of Co-Cr films using electron cyclotron resonance microwave plasma : control by magnetic field

日本応用磁気学会学術講演概要集 Volume 20 Page 237-
published_at 1996
2009010271.pdf
[fulltext] 505 KB
Title
ECRスパッタ法を用いたCo-Cr垂直磁気異方性膜の作成 : 磁界分布による物性制御
Preparation of Co-Cr films using electron cyclotron resonance microwave plasma : control by magnetic field
Creators Sato K.
Creators Yamamoto S.
Creators Kurisu H.
Creators Matsuura M.
Creators Hirono S.
Languages jpn
Resource Type conference paper
Publishers 日本応用磁気学会
Date Issued 1996
Rights
Copyright : 日本応用磁気学会 (The Magnetics Society of Japan)()
File Version Version of Record
Access Rights open access
Relations
[ISSN]1340-8100
[NCID]AN10269644
Schools 大学院理工学研究科(工学)