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Preparation of Co-Cr films using inductively-coupled-plasma assisted magnetron sputtering

The 7th joint MMM-intermag conference Volume GT-02
published_at 1998
2009010253.pdf
[fulltext] 2.07 MB
Title
Preparation of Co-Cr films using inductively-coupled-plasma assisted magnetron sputtering
Creators Yamamoto S.
Creators Hayashi T.
Creators Kurisu H.
Creators Matsuura M.
The 7th joint MMM-intermag conference, San Francisco, California, January 6-9, 1998.
Languages eng
Resource Type conference paper
Publishers Institute of Electrical and Electronics Engineers
Date Issued 1998
Rights
c2010 IEEE., Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any()
File Version Version of Record
Access Rights open access
Relations
[NCID]BA40435294
[ISBN]0780351185
Schools 大学院理工学研究科(工学)