Negative Ion Density Distribution in a Volume Negative Ion Source - Its Dependence on Plasma Parameters

Creators Mori S.

Creators Tauchi Y.

Creators Fukumasa O.

Creators Hamabe M.

Creators Takeiri Y.

In a volume negative ion source, H/sup -/ ions are formed in hydrogen plasmas by dissociative attachment of slow plasma electrons to highly vibrationally excited hydrogen molecules, and these vibrational molecules are produced by energetic electron impact. Production of D/sup -/ ions is believed to be the same as that of H/sup -/ ions. To develop efficient D/sup -/ ion sources, it is important to study production and control of D/sub 2/ plasmas, and to understand difference in the negative ion volume production between H/sub 2/ plasmas and D/sub 2/ plasmas. For this purpose, we discuss isotope effect of H/sup -//D/sup -/ production and to clarify the dependence of negative ion production on plasma parameters by measuring negative ion densities in the source.

c2003 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. IEEE International Conference on Plasma Science, 2003, 209()

info:doi/10.1109/PLASMA.2003.1228694

[ISBN]078037911X