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Jiang Zhongwei

Affiliate Master Yamaguchi University

Condition monitoring of silicon-wafer slicer cutting crystal ingots

Structural health monitoring : current status and perspectives : proceedings of the International Workshop on Structural Health Monitoring Page 624-635
published_at 1997
Title
Condition monitoring of silicon-wafer slicer cutting crystal ingots
Creators Jiang Z.
Creators Chonan S.
Creators Kawashima K.
Creators Muto K.
Creators Ichihara W.
The International Workshop on Structural Health Monitoring, Stanford University, Stanford, CA, September 18-20, 1997.
Languages eng
Resource Type conference paper
Publishers Technomic
Date Issued 1997
File Version Not Applicable (or Unknown)
Access Rights metadata only access
Relations
[NCID]BA37554397
[ISBN]1566766052
Schools 大学院理工学研究科(工学)