Jiang Zhongwei

Affiliate Master Yamaguchi University

Active control of a silicon-wafer slicer cutting a crystal ingot : effect on the deflection control of the air film stiffness between the blade and the ingot

Proceedings of the International Conference on Motion and Vibration Control Volume 2nd Page 52-57

published_at 1994

2009010407.pdf

[fulltext] 589 KB

Title

Active control of a silicon-wafer slicer cutting a crystal ingot : effect on the deflection control of the air film stiffness between the blade and the ingot

Creators Masui Keijiro

Creators Chonan Seiji

Creators Jiang Zhong-wei

Second International Conference on Motion and Vibration Control, Yokohma, Aug.30-Sept.3, 1994.

Languages eng

Resource Type conference paper

Publishers 日本機械学会

Date Issued 1994

File Version Version of Record

Access Rights open access

Relations

[NCID]AA11902354

Schools 大学院理工学研究科（工学）