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Jiang Zhongwei

Affiliate Master Yamaguchi University

Active control of a silicon-wafer slicer cutting a crystal ingot : effect on the deflection control of the air film stiffness between the blade and the ingot

Proceedings of the International Conference on Motion and Vibration Control Volume 2nd Page 52-57
published_at 1994
2009010407.pdf
[fulltext] 589 KB
Title
Active control of a silicon-wafer slicer cutting a crystal ingot : effect on the deflection control of the air film stiffness between the blade and the ingot
Creators Masui Keijiro
Creators Chonan Seiji
Creators Jiang Zhong-wei
Second International Conference on Motion and Vibration Control, Yokohma, Aug.30-Sept.3, 1994.
Languages eng
Resource Type conference paper
Publishers 日本機械学会
Date Issued 1994
File Version Version of Record
Access Rights open access
Relations
[NCID]AA11902354
Schools 大学院理工学研究科(工学)