Yamamoto Setsuo
Affiliate Master
Yamaguchi University
Post-oxidation effects of Co-containing ferrite thin-film deposited by reactive ECR sputtering method
日本応用磁気学会学術講演概要集 Volume 25
Page 8-
published_at 2001
Title
反応性ECRスパッタ法で作製したCo含有酸化鉄薄膜のポスト酸化処理効果
Post-oxidation effects of Co-containing ferrite thin-film deposited by reactive ECR sputtering method
Creators
Hirata K.
Creators
Matsuura M.
Creators
Doi T.
Creators
Tamari K.
Languages
jpn
Resource Type
conference paper
Publishers
日本応用磁気学会
Date Issued
2001
Rights
Copyright : 日本応用磁気学会 (The Magnetics Society of Japan)()
File Version
Version of Record
Access Rights
open access
Relations
[ISSN]1340-8100
[NCID]AN10269644
Schools
大学院理工学研究科（工学）