Yamamoto Setsuo
Affiliate Master
Yamaguchi University
Microstructure of Co-Cr films prepared by ECR sputtering
日本応用磁気学会学術講演概要集 Volume 21
Page 160-
published_at 1997
Title
ECRスパッタ法で作成したCo-Cr膜の微細構造
Microstructure of Co-Cr films prepared by ECR sputtering
Creators
Nakamura T.
Creators
Sato K.
Creators
Kanamaru N.
Creators
Matsuura M.
Creators
Hirono S.
Languages
jpn
Resource Type
conference paper
Publishers
日本応用磁気学会
Date Issued
1997
Rights
Copyright : 日本応用磁気学会 (The Magnetics Society of Japan)()
File Version
Version of Record
Access Rights
open access
Relations
[ISSN]1340-8100
[NCID]AN10269644
Schools
大学院理工学研究科（工学）