Yamamoto Setsuo
Affiliate Master
Yamaguchi University
Preparation of Co-Cr films using inductively-coupled-plasma assisted magnetron sputtering
The 7th joint MMM-intermag conference Volume GT-02
published_at 1998
Title
Preparation of Co-Cr films using inductively-coupled-plasma assisted magnetron sputtering
The 7th joint MMM-intermag conference, San Francisco, California, January 6-9, 1998.
Languages
eng
Resource Type
conference paper
Publishers
Institute of Electrical and Electronics Engineers
Date Issued
1998
Rights
c2010 IEEE., Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any()
File Version
Version of Record
Access Rights
open access
Relations
[NCID]BA40435294
[ISBN]0780351185
Schools
大学院理工学研究科（工学）