Construction of reaction model and heat and mass transfer analysis in thermal CVD process
published_at 2015
Title
熱CVDプロセスにおける反応モデルの構築および熱物質移動解析
Construction of reaction model and heat and mass transfer analysis in thermal CVD process
Degree
博士(工学)
Dissertation Number
理工博甲第656号
(2015-03-16)
Degree Grantors
Yamaguchi University
[kakenhi]15501
grid.268397.1
Creators
羽鳥 祐耶
Resource Type
doctoral thesis
Date Issued
2015
File Version
Not Applicable (or Unknown)
Access Rights
open access
Schools
大学院理工学研究科