Condition monitoring of silicon-wafer slicer cutting crystal ingots
Structural health monitoring : current status and perspectives : proceedings of the International Workshop on Structural Health Monitoring
Page 624-635
published_at 1997
Title
Condition monitoring of silicon-wafer slicer cutting crystal ingots
The International Workshop on Structural Health Monitoring, Stanford University, Stanford, CA, September 18-20, 1997.
Languages
eng
Resource Type
conference paper
Publishers
Technomic
Date Issued
1997
File Version
Not Applicable (or Unknown)
Access Rights
metadata only access
Relations
[NCID]BA37554397
[ISBN]1566766052
Schools
大学院理工学研究科（工学）