Warp control of a silicon-wafer slicer cutting a crystal ingot
Proceedings the international conference on motion and vibration control Volume 3rd
Page 238-243
published_at 1996
Title
Warp control of a silicon-wafer slicer cutting a crystal ingot
Chiba, 1-6 September, 1996.
Languages
eng
Resource Type
conference paper
Publishers
日本機械学会
Date Issued
1996
File Version
Version of Record
Access Rights
open access
Relations
[NCID]BA91385466
Schools
大学院理工学研究科（工学）