Preparation of perpendicular Co-Cr magnetic discs with ECR sputtering
日本応用磁気学会学術講演概要集 Volume 21
Page 158-
published_at 1997
Title
ECRスパッタ法によるCo-Cr垂直磁気ディスクの作製
Preparation of perpendicular Co-Cr magnetic discs with ECR sputtering
Creators
Kanamaru N.
Creators
Nakamura T.
Creators
Matsuura M.
Creators
Hirono S.
Languages
jpn
Resource Type
conference paper
Publishers
日本応用磁気学会
Date Issued
1997
Rights
Copyright : 日本応用磁気学会 (The Magnetics Society of Japan)()
File Version
Version of Record
Access Rights
open access
Relations
[ISSN]1340-8100
[NCID]AN10269644
Schools
大学院理工学研究科（工学）