Preparation of Co-Cr films using electron cyclotron resonance microwave plasma : control by magnetic field
日本応用磁気学会学術講演概要集 Volume 20
Page 237-
published_at 1996
Title
ECRスパッタ法を用いたCo-Cr垂直磁気異方性膜の作成 : 磁界分布による物性制御
Preparation of Co-Cr films using electron cyclotron resonance microwave plasma : control by magnetic field
Languages
jpn
Resource Type
conference paper
Publishers
日本応用磁気学会
Date Issued
1996
Rights
Copyright : 日本応用磁気学会 (The Magnetics Society of Japan)()
File Version
Version of Record
Access Rights
open access
Relations
[ISSN]1340-8100
[NCID]AN10269644
Schools
大学院理工学研究科（工学）