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タイトルHigh thermal efficiency-type laminar plasma jet generator for plasma processing
作成者Osaki, Katashi
Fukumasa, Osamu
Kobayashi, Akira
作成者ヨミオオサキ, カタシ
フクマサ, オサム
コバヤシ, アキラ
作成者別表記大崎, 堅
福政, 修
作成者所属山口大学大学院理工学研究科(工学)
内容記述(抄録等)A laminar plasma jet was produced by the forced constricted-type plasma jet generator with a vortex gas injection-type nozzle, in which the forced elongated arc was constricted locally and the wall was cooled by the vortex gas flow. The stable and long laminar plasma jet with high heat energy was obtained at a total working gas flow rate of less than 7 l/min and a vortex gas flow ratio, i.e. the ratio of the vortex gas flow rate to the working gas flow rate, of 0.1?0.3. Also, the arc voltage?current characteristic of the elongated arc was a rising characteristic in spite of the low gas flow rate, and the thermal efficiency of this generator was improved slightly.
本文言語eng
著者キーワードPlasma jet generator
Thermal plasma
Laminar plasma
Plasma processing
主題電気電子工学
資料タイプtext
出版者Elsevier
NII資料タイプ学術雑誌論文
査読の有無査読あり
ISSN0042-207X
NCIDAA00879589
掲載誌名Vacuum
59
1
開始ページ47
終了ページ54
発行日2000-10
DOIinfo:doi/10.1016/S0042-207X(00)00253-0
関連情報URL(IsPartOf)http://www.sciencedirect.com/science/journal/0042207X
著者版/出版社版その他
リポジトリID2007020112
地域区分山口大学
URIhttp://www.lib.yamaguchi-u.ac.jp/yunoca/handle/2007020112