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フルテキストURL2007010092.pdf ( 356.6KB ) 公開日 2010-04-16
タイトルControl of reactive plasmas in a multicusp plasma source equipped with a movable magnetic filter
作成者Fukumasa, Osamu
Naitou, Hiroshi
Sakiyama, Satoshi
作成者ヨミフクマサ, オサム
ナイトウ, ヒロシ
サキヤマ, サトシ
作成者別表記福政, 修
作成者所属山口大学大学院理工学研究科(工学)
内容記述(抄録等)With the use of both a movable magnetic filter and a plasma grid, plasma parameters (H2-CH4 or Ar-CH4 plasmas) are spatially well controlled. At any filter position, plasma parameters change steeply across the magnetic filter. Then, a plasma source is divided into the two parts, i.e., the source plasma region (high density plasma with energetic electrons) and the diffused plasma region (low density and low-temperature plasma without energetic electrons). Plasma parameters in the diffused plasma are well controlled by changing the plasma grid potential. The role of the magnetic filter (i.e., preferential reflection of energetic electrons) is well clarified by computer simulation. The relation between plasma parameters and some species of neutral radicals is also briefly discussed.
本文言語eng
主題電気電子工学
資料タイプtext
ファイル形式application/pdf
出版者American Institute of Physics
NII資料タイプ学術雑誌論文
査読の有無査読あり
ISSN0021-8979
掲載誌名Journal of Applied Physics
74
2
開始ページ848
終了ページ852
発行日1993-07
DOIinfo:doi/10.1063/1.354876
関連情報URL(IsPartOf)http://jap.aip.org/
著者版/出版社版出版社版
リポジトリID2007010092
地域区分山口大学
URIhttp://www.lib.yamaguchi-u.ac.jp/yunoca/handle/2007010092