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タイトルNumerical simulation of hydrogen ion species in the steady-state plasma of a low-pressure ion source
作成者Fukumasa, Osamu
Itatani, Ryohei
Saeki, Setsuo
作成者ヨミフクマサ, オサム
イタタニ, リョウヘイ
サエキ, セツオ
作成者別表記福政, 修
佐伯, 節夫
作成者所属山口大学大学院理工学研究科(工学)
内容記述(抄録等)Ion species ratios in a hydrogen plasma are calculated systematically as a function of plasma parameters, i.e. the electron density, the electron temperature the pressure of hydrogen gas and the plasma volume. Furthermore, in the present analysis, the recombination factor for hydrogen atoms at the wall surface of a vacuum vessel is treated as another plasma parameter. The most significant point is that ion species ratios depend strongly not only on plasma parameters but also on the recombination factor. The proton ratio increases with decreasing the value of the recombination factor. Primary electrons also play an important role for ion species ratios, and the presence of primary electrons causes the proton ratio to decrease.
本文言語eng
資料タイプtext
出版者Institute of Physics
NII資料タイプ学術雑誌論文
査読の有無査読あり
ISSN0022-3727
NCIDAA00704905
掲載誌名Journal of physics. D, Applied physics
18
12
開始ページ2433
終了ページ2449
発行日1985-12
DOIinfo:doi/10.1088/0022-3727/18/12/012
関連情報URL(IsPartOf)http://www.iop.org/EJ/journal/0022-3727
著者版/出版社版その他
リポジトリID2008010126
地域区分山口大学
URIhttp://www.lib.yamaguchi-u.ac.jp/yunoca/handle/2008010126