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フルテキストURLKJ00000156204.pdf ( 608.0KB ) 公開日 2010-04-19
タイトルCd-Sn 酸化物および Cd-Sn-In 酸化物透明導電膜 (I)
タイトルヨミCd Sn サンカブツ オヨビ Cd Sn In サンカブツ トウメイ ドウデンマク ( I )
タイトル別表記Transparent Electrical Conductive Cd-Sn Oxide and Cd-Sn-In Oxide Films
作成者宮田, 直之
三宅, 清司
中岡, 秀章
作成者ヨミミヤタ, ナオユキ
ミヤケ, キヨシ
ナカオカ, ヒデアキ
作成者別表記Miyata, Naoyuki
Miyake, Kiyoshi
Nakaoka, Hideaki
作成者所属山口大学工学部
内容記述(抄録等)Recently transparent conductive films have been studied in order to find these wide applications on electro-optic devices. The purpose of our study is to obtain cadmium stannate films with high electrical conductivity and high optical transparency in the visible region. The film was prepared on Pyrex glass, quartz and soda-lime glass plate by chemical spray deposition to find an optimum range of substrate temperature. Aqueous solution of cadmium chloride, stannic chloride, and indium chloride was adopted for spray. These films were deposited on a substrate in the range of temperature from 400℃ to 900℃, and high transparent conductive film was obtained, an optimum temperature was found to be in the range from 500℃ to 600℃. Under these conditions, the film prepared from Cd : Sn, 10 : 1 spray solution has a sheet resistance 800 ohms/square, and the film deposited from Cd : Sn, 3 : 1 has a sheet resistance 1200 ohms/square. The optical transmission of Cd-Sn-In films in the visible region depends on the amount of In dopant. The electrical sheet resistance of these films was reduced by heat treatment in O_2 atmosphere for 30-120 minutes at 200℃, and the decrease in sheet resistance during the heat treatment was about 30%. The optical transmission of Cd-Sn film was about 80% in the visible and near-infrared region, and increase in the optical transmission was about 10% by heat treatment for 30 minutes.
本文言語jpn
主題電気電子工学
資料タイプtext
ファイル形式application/pdf
出版者山口大学工学部
出版者ヨミヤマグチ ダイガク コウガクブ
NII資料タイプ紀要論文
ISSN0372-7661
NCIDAN00244228
学内刊行物(紀要等)山口大学工学部研究報告
掲載誌名山口大学工学部研究報告
掲載誌名別表記Memoirs of the Faculty of Engineering, Yamaguchi University
28
2
開始ページ235
終了ページ240
発行日1978
著者版/出版社版出版社版
備考本文データは国立情報学研究所において電子化したものである
リポジトリIDKJ00000156204
地域区分山口大学
URIhttp://www.lib.yamaguchi-u.ac.jp/yunoca/handle/KJ00000156204